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 1

Motorola Sensor Device Data

Manifold  Absolute  Pressure  Sensors

On-Chip  Signal  Conditioned,

0.25  V  to  4.9  V  Output,  Temperature

Compensated  and  Calibrated

The Motorola MPXT4100A/4101A/4105A series Manifold Absolute Pressure (MAP)

sensor for engine control is designed to sense absolute air pressure within the intake

manifold. This measurement can be used to compute the amount of fuel required for

each cylinder. The small form factor and high reliability of on–chip integration makes the

Motorola MAP sensor a logical and economical choice for automotive system designers.

Features

1.8% Maximum Error Over 0

°

to 85

°

C

Specifically Designed for Intake Manifold Absolute Pressure Sensing in Engine

Control Systems

Ideally Suited for Microprocessor Interfacing

Patented Silicon Shear Stress Strain Gauge

Temperature Compensated Over – 40

°

C to +125

°

C

Surface Mount Package

Ideal for Non–Automotive Applications

Also Available in Unibody Package

Application Examples

Manifold Sensing for Automotive Systems

MAXIMUM RATINGS 

(TC = 25

°

C unless otherwise noted)

Rating

Symbol

Value

Unit

Overpressure(1) (P1 > P2)

Pmax

400

kPa

Burst Pressure(1) (P1 > P2)

Pburst

1000

kPa

Storage Temperature

Tstg

– 40 to +125

°

C

Operating Temperature

TA

– 40 to +125

°

C

Figure 1. Fully Integrated Pressure Sensor Schematic

VS

3

X–ducer

SENSING

ELEMENT

1

Vout

2

GND

THIN FILM

TEMPERATURE

COMPENSATION

AND

GAIN STAGE #1

GAIN STAGE #2

AND

GROUND

REFERENCE

SHIFT CIRCUITRY

PINS 5, 6, 7 AND 8 ARE NO CONNECTS

The MPXT4100A/4101A/4105A series piezoresistive

transducer is a state–of–the–art, monolithic, signal con-

ditioned, silicon pressure sensor. This sensor, with its pat-

ented transducer, combines advanced micromachining

techniques, thin film metallization, and bipolar semicon-

ductor processing to provide an accurate, high level analog

output signal that is proportional to applied pressure.

Figure 1 shows a block diagram of the internal circuitry

integrated on a pressure sensor chip.

Senseon and X–ducer are trademarks of Motorola, Inc.

Order this document

by  MPXT4100/D

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

©

 Motorola, Inc. 1997

MPXT4100

MPXT4101

MPXT4105

SERIES

4100A: 20–105 kPa

4101A: 15–102 kPa

4105A: 15–105 kPa

X–ducer

SILICON

PRESSURE SENSORS

PIN NUMBER

NOTE: Pins 5, 6, 7, and 8 are not

device connections. Do not connect

to external circuitry or ground. Pin 1

is noted by the notch in the Lead.

BASIC ELEMENT

CASE 473A–01, STYLE 2

1

2

3

Gnd

+Vout

VS

5

6

7

N/C

N/C

N/C

4

8

*

Vout

N/C

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MPXT4100  MPXT4101  MPXT4105  SERIES

 2

Motorola Sensor Device Data

MPXT4100A SERIES OPERATING CHARACTERISTICS 

(VS = 5.1 Vdc, TA = 25

°

C unless otherwise noted, P1 > P2)

Characteristic

Symbol

Min

Typ

Max

Unit

Pressure Range

POP

20

105

kPa

Supply Voltage(2)

VS

4.85

5.1

5.35

Vdc

Supply Current

Io

7.0

10

mAdc

Offset(3)

(0 to 85

°

C)

Voff

0.225

0.306

0.388

V

Full Scale Output(4)

(0 to 85

°

C)

VFSO

4.816

4.897

4.978

Vdc

Full Scale Span(5)

(0 to 85

°

C)

VFSS

4.510

4.591

4.672

V

Accuracy(6)

(0 to 85

°

C)

±

1.8

%VFSS

Sensitivity

V/

P

54

mV/kPa

Response Time(7)

tR

1.0

ms

Output Source Current at Full Scale Output

Io+

0.1

mA

MECHANICAL CHARACTERISTICS

Characteristic

Symbol

Min

Typ

Max

Unit

Weight, Basic Element (Case 473)

2.0

Grams

Warm–Up Time(8)

15

mSec

Cavity Volume

0.01

IN3

Volumetric Displacement

0.001

IN3

Common Mode Line Pressure(

11

)

690

kPa

MPXT4101A SERIES OPERATING CHARACTERISTICS 

(VS = 5.1 Vdc, TA = 25

°

C unless otherwise noted, P1 > P2)

Characteristic

Symbol

Min

Typ

Max

Unit

Pressure Range

POP

15

102

kPa

Supply Voltage(2)

VS

4.85

5.1

5.35

Vdc

Supply Current

Io

7.0

10

mAdc

Offset(3)

(0 to 85

°

C)

Voff

0.171

0.252

0.333

V

Full Scale Output(4)

(0 to 85

°

C)

VFSO

4.870

4.951

5.032

Vdc

Full Scale Span(5)

(0 to 85

°

C)

VFSS

4.618

4.700

4.782

V

Accuracy(6)

(0 to 85

°

C)

±

1.8

%VFSS

Sensitivity

V/

P

54

mV/kPa

Response Time(7)

tR

1.0

ms

Output Source Current at Full Scale Output

Io+

0.1

mA

MECHANICAL CHARACTERISTICS

Characteristic

Symbol

Min

Typ

Max

Unit

Weight, Basic Element (Case 473)

2.0

Grams

Warm–Up Time(8)

15

mSec

Cavity Volume

0.01

IN3

Volumetric Displacement

0.001

IN3

Common Mode Line Pressure(

11

)

690

kPa

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MPXT4100  MPXT4101  MPXT4105  SERIES

 3

Motorola Sensor Device Data

MPXT4105A SERIES OPERATING CHARACTERISTICS 

(VS = 5.1 Vdc, TA = 25

°

C unless otherwise noted)

Characteristic

Symbol

Min

Typ

Max

Unit

Pressure Range

POP

15

105

kPa

Supply Voltage(2)

VS

4.85

5.1

5.35

Vdc

Supply Current

Io

7.0

10

mAdc

Offset(3)

(0 to 85

°

C)

Voff

0.184

0.306

0.428

Vdc

Full Scale Output(4)

(0 to 85

°

C)

VFSO

4.804

4.896

4.988

Vdc

Full Scale Span(5)

(0 to 85

°

C)

VFSS

4.590

Vdc

Accuracy(6)

(0 to 85

°

C)

"

1.8

%VFSS

Sensitivity

V/

P

51

mV/kPa

Response Time(7)

tR

1.0

ms

Output Source Current at Full Scale Output

Io+

0.1

mAdc

Offset Stability(9)

"

0.65

%VFSS

MECHANICAL CHARACTERISTICS

Characteristic

Symbol

Min

Typ

Max

Unit

Weight, Basic Element (Case 473)

2.0

Grams

Warm–Up Time(8)

15

mSec

Cavity Volume

0.01

IN3

Volumetric Displacement

0.001

IN3

Common Mode Line Pressure(

11

)

690

kPa

NOTES:

1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

2. Device is ratiometric within this specified excitation range.

3. Offset (Voff) is defined as the output voltage at the minimum rated pressure.

4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure.

5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

minimum rated pressure.

6. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span

at 25

°

C due to all sources of error including the following:

Linearity:

Output deviation from a straight line relationship with pressure over the specified pressure range.

Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is

cycled to and from the minimum or maximum operating temperature points, with minimum specified

pressure applied.

Pressure Hysteresis:

Output deviation at any pressure within the specified range, when this pressure is cycled to and from 

minimum or maximum rated pressure at 25

°

C.

TcSpan:

Span deviation per 

°

C over the temperature range of 0

°

 to 85

°

C, as a percent of span at 25

°

C.

TcOffset:

Output deviation per 

°

C with minimum pressure applied, over the temperature range of 0

°

 to 85

°

C.

7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to

a specified step change in pressure.

8. Warm–up Time is defined as the time required for the product to meet the specified output voltage.

9. Offset Stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

10. Decoupling circuit shown in Figure 3 required to meet specification.

11. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.

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MPXT4100  MPXT4101  MPXT4105  SERIES

 4

Motorola Sensor Device Data

Figure 2. Cross Sectional Diagram

(Not to Scale)

µ

 PROCESSOR

A/D

51 k

50 pF

SENSOR

OUTPUT

(PIN 1)

Figure 3. Decoupling Filter for Sensor to

Microprocessor Interface

ÇÇÇÇ

ÇÇÇÇ

ÉÉÉÉÉÉÉÉÉÉÉÉ

ÉÉÉÉÉÉÉÉÉÉÉÉ

ÉÉÉÉÉÉÉÉÉÉÉÉ

ÉÉÉÉÉÉÉÉÉÉÉÉ

ÉÉÉÉÉÉÉÉÉÉÉÉ

ÉÉÉÉÉÉÉÉÉÉÉÉ

FLUORO SILICONE

DIE COAT

WIRE BONDS

LEAD FRAME

DIE

STAINLESS STEEL

METAL COVER

EPOXY CASE

P1

Figure 2 illustrates an absolute sensing chip in the basic

chip carrier (Case 473). A fluorosilicone gel isolates the die

surface and wire bonds from the environment, while allowing

the pressure signal to be transmitted to the sensor dia-

phragm. The MPXT4100A/4101A/4105A series pressure

sensor operating characteristics, and internal reliability and

qualification tests are based on use of dry air as the pressure

media. Media, other than dry air, may have adverse effects

on sensor performance and long–term reliability. Contact the

factory for information regarding media compatibility in your

application.

Figure 3 shows a typical decoupling circuit for interfacing

the integrated MAP sensor to the A/D input of a microproces-

sor. Proper decoupilng of the power supply is recommended.

Figures 4, 5, and 6 show the sensor output signal relative

to pressure input. Typical, minimum, and maximum output

curves are shown for operation over a temperature range of

0

°

 to 85

°

C. (The output will saturate outside of the specified

pressure range.)

OUTPUT

 (V

olts)

5.0

4.5

4.0

3.5

3.0

Pressure (ref: to sealed vacuum) in kPa

TYP

MAX

MIN

5

10

15

20

25

30

35

40

45

50

55

60

65

70

75

80

85

90

95

100

105

2.5

2.0

1.5

1.0

0.5

0

11

0

Figure 4. Output versus Absolute Pressure

TEMP = 0 to 85

°

C

20 kPA TO 105 kPA

MPXT4100A

TRANSFER FUNCTION:

Vout = Vs* (.01059*P–.152) 

±

 Error

VS = 5.1 Vdc

OUTPUT

 (V

olts)

6.0

5.0

4.0

3.0

2.0

Pressure (ref: to sealed vacuum) in kPa

TYP

MAX

MIN

5

10

15

20

25

30

35

40

45

50

55

60

65

70

75

80

85

90

95

100

105

1.0

0.0

Figure 5. Output versus Absolute Pressure

TEMP = 0 to 85

°

C

15 kPA TO 102 kPA

MPXT4101A

TRANSFER FUNCTION:

Vout = Vs* (.01059*P–.109) 

±

 Error

VS = 5.1 Vdc

OUTPUT

 (V

olts)

5.0

4.5

4.0

3.5

3.0

Pressure (ref: to sealed vacuum) in kPa

MAX

MIN

0

5

10

15

20

25

30

35

40

45

50

55

60

65

70

75

80

85

90

95

100

2.5

2.0

1.5

1.0

0.5

0

105

Figure 6. Output versus Absolute Pressure

TEMP = 0 to 85

°

C

15 kPA TO 105 kPA

MPXT4105A

TRANSFER FUNCTION:

Vout = Vs* (0.01*P–0.09) 

±

 Error

VS = 5.1 Vdc

11

0

TYP

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MPXT4100  MPXT4101  MPXT4105  SERIES

 5

Motorola Sensor Device Data

Transfer Function (MPXT4100A)

Nominal Transfer Value: Vout = VS (P x 0.01059 – 0.1518)

+/– (Pressure Error x Temp. Factor x 0.01059 x VS)

VS = 5.1 V 

±

 0.25 Vdc

Temperature Error Band

MPXT4100A Series

– 40

3

0 to 85

1

+125

3

Temperature in C

°

4.0

3.0

2.0

0.0

1.0

–40

–20

0

20

40

60

140

120

100

80

Temperature

Error

Factor

Temp

Multiplier

Pressure Error Band

Error Limits for Pressure

3.0

2.0

1.0

–1.0

– 2.0

– 3.0

0.0

20

40

60

80

100

120

Pressure (in kPa)

Pressure Error (kPa)

Pressure

Error (Max)

20 to 105 (kPa)

±

1.5 (kPa)

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MPXT4100  MPXT4101  MPXT4105  SERIES

 6

Motorola Sensor Device Data

Nominal Transfer Value: Vout = VS (P x 0.01059  – 0.10941)

+/– (Pressure Error x Temp. Factor x 0.01059 x VS)

VS = 5.1 V 

±

 0.25 Vdc

Transfer Function (MPXT4101A)

Temperature Error Band

Temperature in 

°

C

4.0

3.0

2.0

0.0

1.0

–40

–20

0

20

40

60

120

100

80

MPXT4101A Series

– 40

3

0 to 85

1

+125

3

Temperature

Error

Factor

140

Temp

Multiplier

Pressure Error Band

Error Limits for Pressure

Pressure (in kPa)

3.0

2.0

1.0

–1.0

– 2.0

– 3.0

0.0

0

15

30

45

60

75

90

105

120

Pressure Error (kPa)

Pressure

Error (Max)

15 to 102 (kPa)

±

1.5 (kPa)

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MPXT4100  MPXT4101  MPXT4105  SERIES

 7

Motorola Sensor Device Data

Transfer Function (MPXT4105A)

Nominal Transfer Value: Vout = VS (P x 0.01 – 0.09)

+/– (Pressure Error x Temp. Factor x 0.01 x VS)

VS = 5.1 V 

±

 0.25 Vdc

Temperature Error Band

MPXT4105A Series

– 40

3.0

– 20

1.5

0 to 85

1.0

125

2.5

Temperature in C

°

4.0

3.0

2.0

0.0

1.0

–40

–20

0

20

40

60

140

120

100

80

Temperature

Error

Factor

NOTE: The Temperature Multiplier is a linear response from –40

°

C to –20

°

C, –20

°

C to 0

°

C, and from 85

°

C to 125

°

C

Temp

Multiplier

Pressure Error Band

Error Limits for Pressure

3.0

2.0

1.0

–1.0

– 2.0

– 3.0

0.0

20

40

60

80

100

120

Pressure (in kPa)

Pressure Error (kPa)

Pressure

Error (Max)

40 to 94 (kPa)

±

1.5 (kPa)

15 (kPa)

±

2.4 (kPa)

105 (kPa)

±

1.8 (kPa)

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MPXT4100  MPXT4101  MPXT4105  SERIES

 8

Motorola Sensor Device Data

ORDERING INFORMATION

The MPXT4100A, MPXT4101A, AND MPXT4105A series MAP silicon pressure sensors are available to be shipped in rails.

Packing Options

Port Options

Leadform

Case No.

MPXT Series Order No.

Marking

Rails

Element

84 degree

473A–01

MPXT4100A7U

MPXT4100A

Rails

Element

84 degree

473A–01

MPXT4101A7U

MPXT4101A

Rails

Element

84 degree

473A–01

MPXT4105A7U

MPXT4105A

PACKAGE DIMENSIONS

CASE 473A–01

ISSUE A

G

–B–

–A–

1

4

8

5

P

F

M

U

R

J

8 PL

S

B

M

0.25 (0.010)

A

S

T

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

3. DIMENSION A AND B DO NOT INCLUDE MOLD

PROTRUSION.

4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).

5. ALL VERTICAL SURFACES 5

_

TYPICAL DRAFT.

6. DIMENSION P TO CENTER OF LEAD WHEN

FORMED PARALLEL.

DIM

MIN

MAX

MIN

MAX

MILLIMETERS

INCHES

A

0.658

0.668

16.71

16.97

B

0.658

0.668

16.71

16.97

C

0.329

0.357

8.36

9.07

F

0.026

0.034

0.660

0.864

G

0.100 BSC

2.54 BSC

J

0.009

0.011

0.23

0.28

L

0.138

0.150

3.81

3.51

M

 15 

  0 

 15 

 

P

0.738

0.748

18.75

19.00

R

0.503

0.523

12.78

13.28

U

0.135

0.145

3.43

3.68

_

_

_

_

L

–T–

C

DETAIL X

S

DETAIL X

S

0.002

0.020

0.05

0.51

SEATING

PLANE

STYLE 2:

PIN 1. GROUND

 2. +VOUT

 3. VSUPPLY

 4. –VOUT

 5. N/C

 6. N/C

 7. N/C

 8. N/C

Motorola reserves the right to make changes without further notice to any products herein.  Motorola makes no warranty, representation or guarantee regarding

the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and

specifically disclaims any and all liability, including without limitation consequential or incidental damages.  “Typical” parameters which may be provided in Motorola

data sheets and/or specifications can and do vary in different applications and actual performance may vary over time.  All operating parameters, including “Typicals”

must be validated for each customer application by customer’s technical experts.  Motorola does not convey any license under its patent rights nor the rights of

others.  Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other

applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury

or death may occur.  Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola

and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees

arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that

Motorola was negligent regarding the design or manufacture of the part. Motorola and        are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal

Opportunity/Affirmative Action Employer.

Mfax is a trademark of Motorola, Inc.

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MPXT4100/D